The 89-year-old Ukrainian-born suspect was deported from the United States to be placed in a Munich prison's medical unit. Demjanjuk is to undergo medical checks for authorities to decide whether he is fit to stand trial. He had been taken by ambulance to the airport in Cleveland, Ohio
The Supreme Court last Thursday denied a stay of deportation for Demjanjuk, rejecting lawyer's claims that he was too ill and frail to be sent overseas.
The deportation is a new chapter in the pursuits of the alleged Nazi criminal, which date back 30 years.
Demjanjuk was once accused by the United States and Israel of being a notoriously brutal S.S. guard at Treblinka camp, where he was allegedly known as "Ivan the Terrible." The allegation was eventually dropped by both countries.
However, Nazi-era documents including a photo ID discovered later identify Demjanjuk as a guard at the Sobibor and Treblinka death camps in Nazi-occupied Poland.
Demjanjuk has said he was a Red Army soldier who was captured by the Nazis. He once said he "had sold his soul for a slice of bread," but insisted he had killed no one.
Images released by the U.S. government several days ago, which show Demjanjuk shopping and entering his car unaided, are believed to have influenced the U.S. court's deportation decision weeks after defense lawyers secured a delay in his extradition on grounds of poor health.